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SEMI E102 — Provisional Specification for CIM Framework Material Transport and Storage Component
It expands the GEM standard requirements and capabilities in the areas of state models (TSC
SEMI M54 — Guide for Semi-Insulating (SI) GaAs Material Parameters
SEMI F32 — Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
本安全ガイドラインは，装置サプライヤ，設備サプライヤ，ユーザのコントラクタ，ユーザといった様々な会社の人々が共有する作業エリアを対象とする。
P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates StdDcs-Inactive SEMI E102 — Provisional SpecificationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the glass substrate for hard surface photomasks. This Document covers square photomasks up to 7 inches in length.
US$ 181.00
US$ 8100.00