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SEMI G87-1108 (Reapproved 1020)
This Specification does not cover test wafers intended for applications placing higher demands on silicon wafers
SEMI M71-0707 (first published)
SEMI MF1982 — Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography
他の測定方法が，クラックの数や長さについて本方法と似た情報を出すこともあり得るが，それらの主題は本方法の主題とは異なる。
S01100 - SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments StdPbc-0912 SEMI G87-1108 (Reapproved 1020)NOTICE: This Document was balloted and approved for withdrawal in 2006. These guidelines are intended as a minimum set of performance based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2. Referenced SEMI Standards (purchase separately)SEMI S2 Safety Guidelines for Semiconductor Manufacturing Equipment SEMI S8 Safety Guidelines for
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