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D05400 - SEMI D54 - Specification for Substrate Management of FPD Production (SMS-FPD) StdDcs-Inactive • Management of recipes is

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Description

• Management of recipes is centralized to RMS (Single Point Of Recipe Management [SPORM] concept)

This standard was developed to address a North American need for a common set of requirements for specifying

• Reduction of operator efforts required to maintain consistency of recipes in equipment with recipes in Recipe Server by providing an automated consistency maintenance mechanism based on cache

This Document also provides a guide for a grade of hexamethyldisilazane for which a need has been identified

maintenance technicians and engineers

D05400 - SEMI D54 - Specification for Substrate Management of FPD Production (SMS-FPD) StdDcs-Inactive • Management of recipes isThis standard was technically approved by the global Flat Panel Display Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at www. semi. org in June 2009. E This standard was editorially modified in October 2009 to correct editorial errors. Changes were made to 7. 3. 4. 2, 10. 2. 3. 4, 10. 2. 3. 5, and 10. 2. 3. 6. At the production line of FPD, an

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